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Search for "magnetic multilayers" in Full Text gives 1 result(s) in Beilstein Journal of Nanotechnology.

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

  • Victor Deinhart,
  • Lisa-Marie Kern,
  • Jan N. Kirchhof,
  • Sabrina Juergensen,
  • Joris Sturm,
  • Enno Krauss,
  • Thorsten Feichtner,
  • Sviatoslav Kovalchuk,
  • Michael Schneider,
  • Dieter Engel,
  • Bastian Pfau,
  • Bert Hecht,
  • Kirill I. Bolotin,
  • Stephanie Reich and
  • Katja Höflich

Beilstein J. Nanotechnol. 2021, 12, 304–318, doi:10.3762/bjnano.12.25

Graphical Abstract
  • -mat are presented. Keywords: automated patterning; focused He ion beam; graphene; magnetic multilayers; mechanical resonator; pattern generation; plasmonic antennas; two-dimensional materials; Introduction Future breakthroughs in nanotechnology will rely on the ability to fabricate materials and
  • selected to demonstrate the different capabilities of FIB-o-mat. These include high-level patterning with automation of magnetic multilayers, low-level patterning with automation of suspended graphene and low-level patterning and beam path optimization for gold on glass. Patterns for all three test cases
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Published 06 Apr 2021
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