Beilstein J. Nanotechnol.2021,12, 304–318, doi:10.3762/bjnano.12.25
-mat are presented.
Keywords: automated patterning; focused He ion beam; graphene; magneticmultilayers; mechanical resonator; pattern generation; plasmonic antennas; two-dimensional materials; Introduction
Future breakthroughs in nanotechnology will rely on the ability to fabricate materials and
selected to demonstrate the different capabilities of FIB-o-mat. These include high-level patterning with automation of magneticmultilayers, low-level patterning with automation of suspended graphene and low-level patterning and beam path optimization for gold on glass. Patterns for all three test cases
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Figure 1:
FIB-o-mat overview. (a) For patterning the beam spot follows a rasterized beam path with a defined ...